The semiconductor automation industry involves wafer handling, packaging, testing, and precision assembly. Each process requires a wide variety of supporting components to ensure cleanroom compatibility, high precision, durability, and smooth automation. Below are the major categories of components widely used in semiconductor equipment and automation systems:
1. Wafer Handling Components
- Wafer rings (round type with notch / square type with notch, SUS420J2 polished finish)
- Wafer expansion rings (POM with glass fiber)
- Wafer protection films (blue film, UV film, anti-scratch type)
- Wafer robot arms (single-arm, dual-arm, aluminum alloy A6061)
- Wafer grippers / claws (Ø300/Ø450 mm, multi-layer clamping)
- Wafer transfer baskets (for 6-inch wafers, A6061 aluminum)
2. Sealing & Vacuum Components
- Magnetic fluid seals (hollow shaft type, flange type)
- Vacuum pipeline fittings (corrugated tubes, KF standard, SUS304)
- PFA pipe fittings (flare type, straight connectors)
- PFA one-way valves
- O-rings (NBR, FKM, FFKM, low-dust fluororubber)
- Sealing strips (PVC, edge protection type)
3. Mechanical Motion & Drive Components
- Multi-rib belts (closed-loop, PL type, black rubber)
- Couplings (parallel-line type PEEK, vibration-reducing type aluminum)
- Rollers (step type, A6061/A6063 anodized, with holes for wafer transport)
- Bearings (ceramic bearings, open type, standard/full-ball)
- Drag chains (cleanroom type, low-noise, engineering plastic or nylon + fiberglass)
- Miniature linear ball bushing guiding units (rod type, standard / compact / integral type, suitable for precision linear guidance)
4. Adjustment & Support Components
- Anti-vibration leveling feet (light, medium, heavy load types; rubber or metal base; adjustable blocks)
- Handwheels (back-side corrugated type, circular rim type, resin or aluminum alloy)
- Handles (curved fixed type, rotating type, screw-lock type)
- Levers & knobs (compression flat locks, screw-type handles)
5. Hinges, Locks & Fasteners
- Hidden hinges (strip type, reinforced, internal mounting, tapered hole type)
- Cleanroom butterfly hinges (flat type, heavy-duty, with dust-proof bushings, or with assisted bearings, anodized finish)
- Latches & magnetic catches (anti-static, dust-proof, strong double-sided magnetic type; heat-resistant magnetic catches with polished cores)
- Concealed handles (standard type, electromagnetic shielding type, SUS304 brushed finish)
- Fasteners & screws (cylindrical head, thin head, ultra-short head, SUS304 / resin / special alloys)
- Washers (resin round washers, through-hole type, custom size)
- Insulation plates (high-temperature resistant, imported materials)
6. Automation Accessories for Cleanroom Use
- Rubber suction nozzles (round-hole and square-hole types, fluororubber, with connecting rods)
- Clamping devices & positioning pins for wafer transfer
- Thermal insulation boards (white, square, high heat-resistance)
- Magnetic gears (sintered type, direct-acting, with screw fixation)
Conclusion
From wafer handling tools to vacuum sealing systems, precision motion components, and cleanroom hinges & locks, the semiconductor automation industry relies on a broad range of specialized parts. Each component must meet strict requirements for precision, cleanliness, durability, and reliability in semiconductor environments.
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